Methods to remove distortion artifacts in scanned projections

Andrew R. Kalukin; Zachary H. Levine; Charles Tarrio; Sean P. Frigo; Ian McNulty; Y. Y. Wang; Cornelia C. Retsch; Markus Kuhn; Barry L. Winn

doi:10.1117/12.363726

22 September 1999 Methods to remove distortion artifacts in scanned projections

Andrew R. Kalukin, Zachary H. Levine, Charles Tarrio, Sean P. Frigo, Ian McNulty, Y. Y. Wang, Cornelia C. Retsch, Markus Kuhn, Barry L. Winn

Author Affiliations +

Proceedings Volume 3772, Developments in X-Ray Tomography II; (1999) https://doi.org/10.1117/12.363726
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Artifacts induced by distortions which sometimes occur in two- dimensional projection images can appear in the resulting tomographic reconstructions. We describe a procedure for analyzing, correcting and removing experimental artifacts, and hence reducing reconstruction artifacts. Two-dimensional and three-dimensional images acquired with scanning transmission x-ray microscopy of a sample containing an integrated circuit interconnect show how these procedures can be successfully applied.

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Andrew R. Kalukin, Zachary H. Levine, Charles Tarrio, Sean P. Frigo, Ian McNulty, Y. Y. Wang, Cornelia C. Retsch, Markus Kuhn, and Barry L. Winn "Methods to remove distortion artifacts in scanned projections", Proc. SPIE 3772, Developments in X-Ray Tomography II, (22 September 1999); https://doi.org/10.1117/12.363726

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