Mirror surface testing by optical feedback interferometry using laser diode

Jiyuan Liu; Ichirou Yamaguchi

doi:10.1117/12.369218

11 November 1999 Mirror surface testing by optical feedback interferometry using laser diode

Jiyuan Liu, Ichirou Yamaguchi

Proceedings Volume 3782, Optical Manufacturing and Testing III; (1999) https://doi.org/10.1117/12.369218
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

A simple and robust interferometer using a laser diode subject to optical feedback is presented. Fringes phase can be locked by the optical feedback within less than 0.2(pi) (peak to valley value) even when the interferometer is placed on a wooden table where the fringe movement caused by vibration amounts to about 6(pi) (peak to valley value) in the absence of optical feedback. The locked fringe pattern with spatial carriers can be analyzed by a fringe analyzer at video rate and the measured results of a spherical mirror showed the same result and repeatability as on an optical bench. We developed an optical feedback interferometric head which is easily to set both vertically and horizontally corresponding to situation of sample.

Citation Download Citation

Jiyuan Liu and Ichirou Yamaguchi "Mirror surface testing by optical feedback interferometry using laser diode", Proc. SPIE 3782, Optical Manufacturing and Testing III, (11 November 1999); https://doi.org/10.1117/12.369218

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KEYWORDS

Mirrors

Interferometers

Semiconductor lasers

Fringe analysis

Optical benches

Optical isolators

Optical testing

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