Programmable two-dimensional microshutter arrays

Samuel Harvey Moseley Jr.; Rainer K. Fettig; Alexander S. Kutyrev; Charles W. Bowers; Randy A. Kimble; Jon Orloff; Bruce E. Woodgate

doi:10.1117/12.361284

2 September 1999 Programmable two-dimensional microshutter arrays

Samuel Harvey Moseley Jr., Rainer K. Fettig, Alexander S. Kutyrev, Charles W. Bowers, Randy A. Kimble, Jon Orloff, Bruce E. Woodgate

Author Affiliations +

Proceedings Volume 3878, Miniaturized Systems with Micro-Optics and MEMS; (1999) https://doi.org/10.1117/12.361284
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

We are developing a two-dimensional array of microshutters which can be used as a high efficiency, high contrast field selection device for a multi-object spectrometer for the Next Generation Space Telescope (NGST). The device is a close- packed array of shutters, with a typical size of 100 microns square and area filling factor of up to 80%. Each shutter, made of single crystal silicon with an appropriate optical coating, pivots on a torsion flexure along one edge. Each of the shutters is individually selectable. An original double- shutter mechanism is employed for actuation. Since the device works in transmission, there is no loss of contrast due to diffraction from the edges of unactuated pixels. When working in reflection, the device can also be used as a micromirror array.

Citation Download Citation

Samuel Harvey Moseley Jr., Rainer K. Fettig, Alexander S. Kutyrev, Charles W. Bowers, Randy A. Kimble, Jon Orloff, and Bruce E. Woodgate "Programmable two-dimensional microshutter arrays", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); https://doi.org/10.1117/12.361284

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