Assembly and alignment of three-aspherical-mirror optics for extreme ultraviolet projection lithography

Katsumi Sugisaki; Tetsuya Oshino; Katsuhiko Murakami; Takeo Watanabe; Hiroo Kinoshita; Atsushi Miyafuji; Shigeo Irie; Shigeru Shirayone

doi:10.1117/12.390114

21 July 2000 Assembly and alignment of three-aspherical-mirror optics for extreme ultraviolet projection lithography

Katsumi Sugisaki, Tetsuya Oshino, Katsuhiko Murakami, Takeo Watanabe, Hiroo Kinoshita, Atsushi Miyafuji, Shigeo Irie, Shigeru Shirayone

Author Affiliations +

Proceedings Volume 3997, Emerging Lithographic Technologies IV; (2000) https://doi.org/10.1117/12.390114
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

We have assembled and aligned projection optics for extreme ultraviolet (EUV) lithography. The projection optics consists of three aspherical mirrors. First, the positions of the mirrors were coarsely adjusted using the side and back surface of the mirrors. Next, the mirrors were finely aligned to minimize the wavefront errors which were measured by an interferometer. The adjustable axes were selected according to the results of the analysis of the allowable error range. The compensation values for each adjustable axis were calculated by commercially available ray-tracing software. After the alignment procedure, the wavefront error of 3 nm RMS was achieved.

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Katsumi Sugisaki, Tetsuya Oshino, Katsuhiko Murakami, Takeo Watanabe, Hiroo Kinoshita, Atsushi Miyafuji, Shigeo Irie, and Shigeru Shirayone "Assembly and alignment of three-aspherical-mirror optics for extreme ultraviolet projection lithography", Proc. SPIE 3997, Emerging Lithographic Technologies IV, (21 July 2000); https://doi.org/10.1117/12.390114

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