Estimation of intrinsic stresses and elastic moduli in thin films

Pedro C. Andia; Francesco Costanzo; Gary L. Gray

doi:10.1117/12.390587

30 June 2000 Estimation of intrinsic stresses and elastic moduli in thin films

Pedro C. Andia, Francesco Costanzo, Gary L. Gray

Proceedings Volume 4097, Complex Mediums; (2000) https://doi.org/10.1117/12.390587
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

An approach is presented for the determination of the residual stresses and elastic moduli of particle systems resulting from computer simulations of particle or atomic deposition. The proposed technique is based on fundamental concepts of elasticity and is capable of capturing the variation of stresses and moduli as functions of position within the system. Application to a perfect FCC crystal and a simple particle system is demonstrated.

Citation Download Citation

Pedro C. Andia, Francesco Costanzo, and Gary L. Gray "Estimation of intrinsic stresses and elastic moduli in thin films", Proc. SPIE 4097, Complex Mediums, (30 June 2000); https://doi.org/10.1117/12.390587

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