Paper
30 June 2000 Stress and compensation of stress in nanoengineered optical coatings
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Abstract
We consider anisotropic stress in substrates coated with vacuum- deposited optically-anisotrpic thin films. Birefringent films with tilted-columnar and normal-columnar nanostructures and thin film helocoidal bianisotropic mediums are considered. In the case of tilted- columnar nanostructures, the sign and relative magnitude of the stresses parallel to the deposition plane and perpendicular to the deposition plane depend on deposition angle. We show that an ion-assisted overcoat, applied with the primary purpose of protecting optical properties, can be designed to provide effective compensation of stress.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ian J. Hodgkinson, Qihong Wu, and Karen E. Thorn "Stress and compensation of stress in nanoengineered optical coatings", Proc. SPIE 4097, Complex Mediums, (30 June 2000); https://doi.org/10.1117/12.390593
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Cited by 1 scholarly publication.
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KEYWORDS
Thin films

Birefringence

Nanostructures

Coating

Optical coatings

Anisotropy

Crystals

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