Advanced methods for surface and subsurface defect characterization of optical components

Joerg Steinert; Stefan Gliech; Andreas Wuttig; Angela Duparre; Horst Truckenbrodt

doi:10.1117/12.405829

2 November 2000 Advanced methods for surface and subsurface defect characterization of optical components

Joerg Steinert, Stefan Gliech, Andreas Wuttig, Angela Duparre, Horst Truckenbrodt

Proceedings Volume 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries; (2000) https://doi.org/10.1117/12.405829
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

We discuss principles of optical surface quality assessment. The micro topography of well polished fused silica, CaF₂ and Si surfaces was examined locally and by covering large sample areas. Power Spectral Densities (PSD) were used for consistent roughness description. Subsurface damage was detected by a modified white light interferometer technique and total scattering measurement.

Citation Download Citation

Joerg Steinert, Stefan Gliech, Andreas Wuttig, Angela Duparre, and Horst Truckenbrodt "Advanced methods for surface and subsurface defect characterization of optical components", Proc. SPIE 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, (2 November 2000); https://doi.org/10.1117/12.405829

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