Present and future interference microscope systems for magnetic head metrology

Paul J. Caber; Artur G. Olszak; Chip Ragan; David J. Aziz

doi:10.1117/12.405817

2 November 2000 Present and future interference microscope systems for magnetic head metrology

Paul J. Caber, Artur G. Olszak, Chip Ragan, David J. Aziz

Proceedings Volume 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries; (2000) https://doi.org/10.1117/12.405817
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

Interference microscopy is the primary tool used in the Data Storage industry for air bearing surface (ABS) and pole tip recession (PTR) measurements. ABS parameters include crown, camber and twist (CCT), and affect the behavior of the magnetic head as it flies above the spinning disk. PTR parameters describe the relative height of the writing poles and reading shield. The roadmap for several types of measurements will be discussed in this paper.

Citation Download Citation

Paul J. Caber, Artur G. Olszak, Chip Ragan, and David J. Aziz "Present and future interference microscope systems for magnetic head metrology", Proc. SPIE 4099, Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries, (2 November 2000); https://doi.org/10.1117/12.405817

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