Low-frequency noncontact photothermal measurements of metal film thickness on a dielectric surface

A. V. Reznikov

doi:10.1117/12.413760

30 January 2001 Low-frequency noncontact photothermal measurements of metal film thickness on a dielectric surface

A. V. Reznikov

Proceedings Volume 4157, Laser-Assisted Microtechnology 2000; (2001) https://doi.org/10.1117/12.413760
Event: Laser-Assisted Microtechnology 2000, 2000, St. Petersburg-Pushkin, Russian Federation

Abstract

It is shown that for integrating control of thickness of uniform metal films along surface samples it is possible to use low frequencies of modulation of heating radiation and relatively large sizes of laser beams, that permits to simplify registration, to reduce the requirements to accuracy of optical adjustment and to simplify mechanical stabilization of all installation to vibrations.

Citation Download Citation

A. V. Reznikov "Low-frequency noncontact photothermal measurements of metal film thickness on a dielectric surface", Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); https://doi.org/10.1117/12.413760

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