Fabrication of microlens arrays in CaF2 by ion milling

Dieter Flamm; Axel Schindler; Torsten Harzendorf; Ernst-Bernhard Kley

doi:10.1117/12.395680

18 August 2000 Fabrication of microlens arrays in CaF₂ by ion milling

Dieter Flamm, Axel Schindler, Torsten Harzendorf, Ernst-Bernhard Kley

Proceedings Volume 4179, Micromachining Technology for Micro-Optics; (2000) https://doi.org/10.1117/12.395680
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

Calcium Fluoride microlens arrays have been produced with the help of an ion milling transfer of photoresist lenses which have been fabricated by two different techniques (i) by a melting resist technique and (ii) gray scale lithography. Major technical problems connected with the ion milling transfer of the photoresist lenses in the CaF₂ material are surface roughness enhancement and variation of the lens shape. We studied the ion-induced decomposition of CaF₂ and the surface roughness equatio in dependence on different milling conditions. For the microlens patter transfer the ratio of etching rates of the photoresist and the CaF₂ have been adjusted by gas admixture of nitrogen to the Ar sputtering gas. The angle dependence of the etching rates leads also to a changing of the lens profile. The effect of ion beam induced surface roughness and the accuracy of the transfer process is discussed.

Citation Download Citation

Dieter Flamm, Axel Schindler, Torsten Harzendorf, and Ernst-Bernhard Kley "Fabrication of microlens arrays in CaF₂ by ion milling", Proc. SPIE 4179, Micromachining Technology for Micro-Optics, (18 August 2000); https://doi.org/10.1117/12.395680

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available