Imaging projection lens for excimer laser micromachining

Ying Wan; Tiechuan Zuo; Yijian Jiang

doi:10.1117/12.403910

10 October 2000 Imaging projection lens for excimer laser micromachining

Ying Wan, Tiechuan Zuo, Yijian Jiang

Proceedings Volume 4222, Process Control and Inspection for Industry; (2000) https://doi.org/10.1117/12.403910
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

In accordance with the practical demand for excimer laser micro- machining technology, an imaging projection lens with a resolution of 2micrometers is designed and produced. Through the practical micro-machining test, the lens achieves the designed specifications and could be put into practical use.

Citation Download Citation

Ying Wan, Tiechuan Zuo, and Yijian Jiang "Imaging projection lens for excimer laser micromachining", Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); https://doi.org/10.1117/12.403910

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