Integrated WDM frequency tuner using polysilicon surface micromachining process

Xu Ming Zhang; Yee Loy Lam; Ai Qun Liu

doi:10.1117/12.404903

20 October 2000 Integrated WDM frequency tuner using polysilicon surface micromachining process

Xu Ming Zhang, Yee Loy Lam, Ai Qun Liu

Proceedings Volume 4230, Micromachining and Microfabrication; (2000) https://doi.org/10.1117/12.404903
Event: International Symposium on Microelectronics and Assembly, 2000, Singapore, Singapore

Abstract

Two monolithically-integrated tunable lasers have been analyzed, designed and fabricated. The potential applications for WDM have also been studied. The tunable lasers use 3D micromirrors integrated with single-mode Fabry-Perot laser diodes and anti-reflection coated optical fibers. The difference between the two tunable lasers is that one uses the movable 3D micromirror driven by comb- drive to change the external cavity length, and the other uses the rotatable 3D micromirror driven by thermal-actuator to change the external feedback strength. For the frequency tuner that uses movable 3D micromirror, a wavelength tunability of 16 nm is obtained using 3V driving voltage. As for the frequency tuner that uses rotatable 3D micromirror, a wavelength tunability of 7 nm is obtained while using 10 mA driving current.

Citation Download Citation

Xu Ming Zhang, Yee Loy Lam, and Ai Qun Liu "Integrated WDM frequency tuner using polysilicon surface micromachining process", Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); https://doi.org/10.1117/12.404903

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