Novel techniques for microscopic imaging of semiconductor surfaces

Vladislav V. Yakovlev; Katerina Mikhailichenko; Sergei V. Govorkov

doi:10.1117/12.428011

29 May 2001 Novel techniques for microscopic imaging of semiconductor surfaces

Vladislav V. Yakovlev, Katerina Mikhailichenko, Sergei V. Govorkov

Proceedings Volume 4276, Commercial and Biomedical Applications of Ultrashort Pulse Lasers; Laser Plasma Generation and Diagnostics; (2001) https://doi.org/10.1117/12.428011
Event: Photonics West 2001 - LASE, 2001, San Jose, CA, United States

Abstract

We develop several new optical techniques for microscopic semiconductor diagnostics and use them for inspection of semiconductor surfaces. Short-pulse lasers (femtosecond Ti:sapphire and Cr⁴⁺:forsterite) are used for nonlinear optical studies.

Citation Download Citation

Vladislav V. Yakovlev, Katerina Mikhailichenko, and Sergei V. Govorkov "Novel techniques for microscopic imaging of semiconductor surfaces", Proc. SPIE 4276, Commercial and Biomedical Applications of Ultrashort Pulse Lasers; Laser Plasma Generation and Diagnostics, (29 May 2001); https://doi.org/10.1117/12.428011

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