Direct Comparison Of Mechanical And Optical Measurements Of The Finish Of Precision-Machined Surfaces

E. L. Church

doi:10.1117/12.936346

15 November 1983 Direct Comparison Of Mechanical And Optical Measurements Of The Finish Of Precision-Machined Surfaces

E. L. Church

Author Affiliations +

Proceedings Volume 0429, Precision Surface Metrology; (1983) https://doi.org/10.1117/12.936346
Event: 27th Annual Technical Symposium, 1983, San Diego, United States

Abstract

Methods for analyzing surface profile data in terms of the finish power spectral density and mean-square finish error are discussed. Results of a preliminary comparison between mechanical- and optical-stylus measurements of a set of precision-machined surfaces are presented. Excellent quantitative agreement is obtained, although certain features observed in the case of strongly periodic surfaces require further study.

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E. L. Church "Direct Comparison Of Mechanical And Optical Measurements Of The Finish Of Precision-Machined Surfaces", Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); https://doi.org/10.1117/12.936346

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