Interferometric Phase Measurement Using Spatial Synchronous Detection

Kenneth H. Womack

doi:10.1117/12.936334

15 November 1983 Interferometric Phase Measurement Using Spatial Synchronous Detection

Kenneth H. Womack

Proceedings Volume 0429, Precision Surface Metrology; (1983) https://doi.org/10.1117/12.936334
Event: 27th Annual Technical Symposium, 1983, San Diego, United States

Abstract

A family of three phase measurement techniques are described that are spatial analogs of the popular temporal phase-shift methods. For these spatial techniques, the need for an active element such as a piezoelectric translator or an electro-optic crystal is eliminated simply by adding tilt to the fringe pattern. Measurements are obtained over a uniform grid with an accuracy comparable to temporal phase-shift interferometry. Advantages and disadvantages are discussed.

Citation Download Citation

Kenneth H. Womack "Interferometric Phase Measurement Using Spatial Synchronous Detection", Proc. SPIE 0429, Precision Surface Metrology, (15 November 1983); https://doi.org/10.1117/12.936334

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