Paper
10 January 2002 Electron beam mastering system for mass data storage
Giles Cartwright, Gerald Reynolds, Chris Bayliss, Adrian Pearce, Colin Dix, Nick Ogilvie
Author Affiliations +
Proceedings Volume 4342, Optical Data Storage 2001; (2002) https://doi.org/10.1117/12.453376
Event: Optical Data Storage, 2001, Santa Fe, NM, United States
Abstract
The development and operation of an Electron Beam Mastering System suitable for the production of high capacity optical discs of several hundred gigabytes per layer is discussed.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Giles Cartwright, Gerald Reynolds, Chris Bayliss, Adrian Pearce, Colin Dix, and Nick Ogilvie "Electron beam mastering system for mass data storage", Proc. SPIE 4342, Optical Data Storage 2001, (10 January 2002); https://doi.org/10.1117/12.453376
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KEYWORDS
Electron beams

Photoresist processing

Data storage

Optical discs

Control systems

Modulation

Process control

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