Telemetry silicon pressure sensor of LC resonance type

SoonYoung Kim; Hak Jin Kim; J. S. Park; Sang Sik Yang

doi:10.1117/12.425371

5 April 2001 Telemetry silicon pressure sensor of LC resonance type

SoonYoung Kim, Hak Jin Kim, J. S. Park, Sang Sik Yang

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425371
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

This paper presents an implantable telemetry LC resonance-type pressure sensor to measure the cerebral ventricle pressure. The sensor consists of an inductor and a capacitor. The LC resonant circuit consists of the sensor and an external antenna coil that are coupled magnetically. The resonance frequency of the circuit decreases as the applied pressure increases the capacitance of the sensor. The sensor is designed in consideration of the biocompatibility and long lifetime for continuous monitoring of the ventricle pressure. This study is focused on the miniaturization of the sensor with a low resonance frequency and a high resolution. The sensor is simple to fabricate and small in comparison with others reported previously. The inductor is fabricated by electroplating and the variable capacitor is constructed with a flexible p+ diaphragm. Also, the deflection of the diaphragm, the variation of the capacitance and the resonance frequency are analyzed and calculated for the ventricle pressure ranging from 0 to 7 kPa.

Citation Download Citation

SoonYoung Kim, Hak Jin Kim, J. S. Park, and Sang Sik Yang "Telemetry silicon pressure sensor of LC resonance type", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425371

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