Optical and electron paramagnetic resonance studies of hydrogenated amorphous carbon (a-C:H) thin films formed by direct ion beam deposition method

M. Silinskas; A. Grigonis; G. Dikcius; H. Manikowski

doi:10.1117/12.425504

10 April 2001 Optical and electron paramagnetic resonance studies of hydrogenated amorphous carbon (a-C:H) thin films formed by direct ion beam deposition method

M. Silinskas, A. Grigonis, G. Dikcius, H. Manikowski

Author Affiliations +

Proceedings Volume 4415, Optical Organic and Inorganic Materials; (2001) https://doi.org/10.1117/12.425504
Event: Advanced Optical Materials and Devices, 2000, Vilnius, United States

Abstract

The diamond-like carbon films, deposited by direct ion beam deposition method using mixture of C₆H₁₄ and H₂ with and without silicon presence, have been investigated by Raman spectroscopy, X-ray photoelectron spectroscopy, ellipsometry, IR-visible-UV transmission, and electron paramagnetic resonance techniques. The D and G line widths and peak positions, integrated intensity ratio (I_D/I_G) in Raman spectra indicate these films being amorphous, mixture of sp² and sp³ bonds. It has been found that a-C:H films formed while increasing substrate temperature and deposition ion energy tend to be graphite-like. Increasing of hydrogen content in gas mixture made these films more polymer-like with low content of dangling bonds. Traces of silicon increase sp³/sp² ratio. The DLC films on silicon are able to greatly reduce IR reflection.

Citation Download Citation

M. Silinskas, A. Grigonis, G. Dikcius, and H. Manikowski "Optical and electron paramagnetic resonance studies of hydrogenated amorphous carbon (a-C:H) thin films formed by direct ion beam deposition method", Proc. SPIE 4415, Optical Organic and Inorganic Materials, (10 April 2001); https://doi.org/10.1117/12.425504

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