Micro-electromechanical spatial light modulators with integrated electronics

Steven Cornelissen; Thomas G. Bifano; Paul A. Bierden

doi:10.1117/12.454712

1 February 2002 Micro-electromechanical spatial light modulators with integrated electronics

Steven Cornelissen, Thomas G. Bifano, Paul A. Bierden

Proceedings Volume 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III; (2002) https://doi.org/10.1117/12.454712
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

This paper describes design and development of a microelectromechanical, micromachined spatial light modulator ((mu) SLM) integrated with complementary metal- oxide semiconductor (CMOS) electronics, for control of optical phase in phase-only optical correlators. The (mu) SLM will consist of a large array of piston-motion MEMS mirror segments (pixels) each of which capable of altering the phase of reflected light by up to one wavelength for infrared (1.5 micrometers ) illumination. Results of a proof-of- concept study are presented along with an electromechanical model and details of the fabrication process for the (mu) SLM.

Citation Download Citation

Steven Cornelissen, Thomas G. Bifano, and Paul A. Bierden "Micro-electromechanical spatial light modulators with integrated electronics", Proc. SPIE 4493, High-Resolution Wavefront Control: Methods, Devices, and Applications III, (1 February 2002); https://doi.org/10.1117/12.454712

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