Design and progress in the fabrication of an EUV micro exposure tool optics for PREUVE

Roland Geyl; Jean-Francois Tanne

doi:10.1117/12.450959

20 December 2001 Design and progress in the fabrication of an EUV micro exposure tool optics for PREUVE

Roland Geyl, Jean-Francois Tanne

Proceedings Volume 4506, Soft X-Ray and EUV Imaging Systems II; (2001) https://doi.org/10.1117/12.450959
Event: International Symposium on Optical Science and Technology, 2001, San Diego, CA, United States

Abstract

SAGEM, through its REOSC product line, is participating since November 1999 to PREUVE, the French EUV initiative, and work within this program especially in the field of EUV illumination and projection optics. After a short description of the PREUVE main lines of activity, we will detail our contributions to this program and work progress. This is mainly focused on basic EUV optics fabrication technology in order to ensure the fabrication of the entire optics assembly of an EUV micro exposure tool.

Citation Download Citation

Roland Geyl and Jean-Francois Tanne "Design and progress in the fabrication of an EUV micro exposure tool optics for PREUVE", Proc. SPIE 4506, Soft X-Ray and EUV Imaging Systems II, (20 December 2001); https://doi.org/10.1117/12.450959

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