Integrated microreactor and its components for dehydrogenation of cyclohexane to benzene

Adam Reppond; Yu Liang; Ji Fang; Tianhong Cui

doi:10.1117/12.442974

28 September 2001 Integrated microreactor and its components for dehydrogenation of cyclohexane to benzene

Adam Reppond, Yu Liang, Ji Fang, Tianhong Cui

Proceedings Volume 4557, Micromachining and Microfabrication Process Technology VII; (2001) https://doi.org/10.1117/12.442974
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

Novel highly integrated microreactors have been fabricated on silicon in order to dehydrogenate cyclohexane to benzene. There are 12 reactor chips on one single silicon wafer. The microreactor consists of three layers, which are reaction chamber integrated with heaters and thermal sensors, separation layer integrated with cantilever flowmeters and gas cover.

Citation Download Citation

Adam Reppond, Yu Liang, Ji Fang, and Tianhong Cui "Integrated microreactor and its components for dehydrogenation of cyclohexane to benzene", Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); https://doi.org/10.1117/12.442974

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