Analysis and design of a capacitive accelerometer based on a electrostatically levitated microdisk

Ruth P. Houlihan; Alena Kukharenka; Mircea Gindila; Michael Kraft

doi:10.1117/12.443012

2 October 2001 Analysis and design of a capacitive accelerometer based on a electrostatically levitated microdisk

Ruth P. Houlihan, Alena Kukharenka, Mircea Gindila, Michael Kraft

Author Affiliations +

Proceedings Volume 4558, Reliability, Testing, and Characterization of MEMS/MOEMS; (2001) https://doi.org/10.1117/12.443012
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

A system-level model of an electrostatically actuated accelerometer is presented. The accelerometer comprises a proof mass levitated between an arrangement of upper and lower pie-shaped electrodes. The proof mass is an electroplated nickel disk, 1 mm in diameter and 200 micrometers thick. The position and orientation of the disk is detected by measuring the differential capacitance between the disk and each of the four upper and corresponding lower electrodes.

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Ruth P. Houlihan, Alena Kukharenka, Mircea Gindila, and Michael Kraft "Analysis and design of a capacitive accelerometer based on a electrostatically levitated microdisk", Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); https://doi.org/10.1117/12.443012

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