Influence of initial curvature on micromachined thermal bimorph actuation

Chengpeng Hsu; Wensyang Hsu

doi:10.1117/12.449160

21 November 2001 Influence of initial curvature on micromachined thermal bimorph actuation

Chengpeng Hsu, Wensyang Hsu

Proceedings Volume 4591, Electronics and Structures for MEMS II; (2001) https://doi.org/10.1117/12.449160
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

While the micro bimorph structures are fabricated with enough initial curvatures or so-called geometrical imperfections, structural instability may occur to result in snap-through behaviors and exhibit large deflection strokes. The bimorph structures with various initial deflections ratios and various heating area ratios are simulated and fabricated to predict the stable and unstable regions of the curved bimorph structures with clamped boundary condition. Four major types of load-deflection curves are described and discussed. Testing results and some observations are reported.

Citation Download Citation

Chengpeng Hsu and Wensyang Hsu "Influence of initial curvature on micromachined thermal bimorph actuation", Proc. SPIE 4591, Electronics and Structures for MEMS II, (21 November 2001); https://doi.org/10.1117/12.449160

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