Double-detector-array 3D profile inspection system

Chongxiang Li; Zhong Ping Fang; Anand Krishna Asundi

doi:10.1117/12.482184

4 September 2002 Double-detector-array 3D profile inspection system

Chongxiang Li, Zhong Ping Fang, Anand Krishna Asundi

Proceedings Volume 4768, Novel Optical Systems Design and Optimization V; (2002) https://doi.org/10.1117/12.482184
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

3-D profile confocal optical microscopy is a newly developed 3-D profile metrology and has widely applied in many kinds of 3-D shape inspection fields. Present 3-D shape measurement system used in confocal optical microscopy is single point measurement. Point by point detection to finish a 3-D profile inspection is considered a time consuming method and isn't suitable for large area measurement especially for high resolution measurement. This paper elaborated on a fiber-array confocal 3-D imaging system to improve measuring speed. In confocal measurement system, light source acts an important effect on system accuracy and repeatability. Light source fluctuation can cause a large error for high resolution 3-D shape measurement. This paper presents a novel system construction to solve the problem of light source fluctuation. The system design is compact and the construction is reasonable.

Citation Download Citation

Chongxiang Li, Zhong Ping Fang, and Anand Krishna Asundi "Double-detector-array 3D profile inspection system", Proc. SPIE 4768, Novel Optical Systems Design and Optimization V, (4 September 2002); https://doi.org/10.1117/12.482184

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