High-resolution surface feature evaluation using multiwavelength optical transforms

Boris Spektor; Gregory Toker; Joseph Shamir; Michael Friedman; Andrei Brunfeld

doi:10.1117/12.472234

20 June 2002 High-resolution surface feature evaluation using multiwavelength optical transforms

Boris Spektor, Gregory Toker, Joseph Shamir, Michael Friedman, Andrei Brunfeld

Proceedings Volume 4777, Interferometry XI: Techniques and Analysis; (2002) https://doi.org/10.1117/12.472234
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

Surface feature evaluation with resolution beyond the classical diffraction limit can be achieved by a combined space--frequency representation of the scattered field. This was demonstrated in a measuring procedure where the surface was consecutively illuminated by a collection of focused beams and the diffracted data was measured in the far field. Mathematically, if the focused beam has a Gaussian profile, the optical system implements a Gabor transform. Other transformations, such as wavelet transforms can be obtained by properly structuring the illuminating beam. This work presents an approach where structured beams at several wavelengths are used. This additional information gathered by this procedure allows an increased resolution and the reduction of ambiguities that may occur in the analysis of single wavelength measurements.

Citation Download Citation

Boris Spektor, Gregory Toker, Joseph Shamir, Michael Friedman, and Andrei Brunfeld "High-resolution surface feature evaluation using multiwavelength optical transforms", Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, (20 June 2002); https://doi.org/10.1117/12.472234

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