In-line optical surface roughness determination by laser scanning

Gregory Toker; Andrei Brunfeld; Joseph Shamir; Boris Spektor; Evan F. Cromwell; Johann F. Adam

doi:10.1117/12.472232

20 June 2002 In-line optical surface roughness determination by laser scanning

Gregory Toker, Andrei Brunfeld, Joseph Shamir, Boris Spektor, Evan F. Cromwell, Johann F. Adam

Proceedings Volume 4777, Interferometry XI: Techniques and Analysis; (2002) https://doi.org/10.1117/12.472232
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

Reliable in-line and in-situ measurement of structure of highly polished surfaces remains a major challenge for the modern industry. Evaluation of the wavefront of a scanning laser beam reflected from a surface allows one to establish a direct correlation between the statistics of the optical signal and the surface roughness. Phase structuring of the laser beam greatly increases the height sensitivity down to the nanometer level. High sampling rate allows one to collect a very large number of sampled data and provide a complete analysis of the surface structure rather than a single parameter such as the rms roughness.

Citation Download Citation

Gregory Toker, Andrei Brunfeld, Joseph Shamir, Boris Spektor, Evan F. Cromwell, and Johann F. Adam "In-line optical surface roughness determination by laser scanning", Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, (20 June 2002); https://doi.org/10.1117/12.472232

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