Synthetic spatial coherence function for optical tomography and profilometry: simultaneous realization of longitudinal coherence scan and phase shift

Zhihui Duan; Mark Gokhler; Joseph Rosen; Hirokazu Kozaki; Nobuo Ishii; Mitsuo Takeda

doi:10.1117/12.472210

20 June 2002 Synthetic spatial coherence function for optical tomography and profilometry: simultaneous realization of longitudinal coherence scan and phase shift

Zhihui Duan, Mark Gokhler, Joseph Rosen, Hirokazu Kozaki, Nobuo Ishii, Mitsuo Takeda

Author Affiliations +

Proceedings Volume 4777, Interferometry XI: Techniques and Analysis; (2002) https://doi.org/10.1117/12.472210
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

A new scheme for synthesizing three-dimensional longitudinal spatial coherence function is proposed. By manipulating the irradiance of an extended quasi-monochromatic spatially incoherent source with a spatial light modulator, we generated a special optical field that exhibits high coherence selectively for the specified location along the optical axis of propagation and for the specified inclination between the two mirrors in the interferometer. The feasibility of the proposed principle is demonstrated by measuring a step height made by standard gauge blocks. The proposed scheme permits one to perform phase shift without recourse to mechanical movement. The quantitative experimental proof of the principle is presented.

Citation Download Citation

Zhihui Duan, Mark Gokhler, Joseph Rosen, Hirokazu Kozaki, Nobuo Ishii, and Mitsuo Takeda "Synthetic spatial coherence function for optical tomography and profilometry: simultaneous realization of longitudinal coherence scan and phase shift", Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, (20 June 2002); https://doi.org/10.1117/12.472210

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