Surface damage metrology: precision at low cost

Lionel R. Baker

doi:10.1117/12.451708

11 November 2002 Surface damage metrology: precision at low cost

Lionel R. Baker

Proceedings Volume 4779, Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components; (2002) https://doi.org/10.1117/12.451708
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

This paper reviews the current status of methods for the inspection and measurement of damage, such as digs and scratches on high quality surfaces and reports on relevant ISO standards. A simple but precise low-cost approach for measuring imperfections and contamination on and within an optical system using a digital camera is described.

Citation Download Citation

Lionel R. Baker "Surface damage metrology: precision at low cost", Proc. SPIE 4779, Advanced Characterization Techniques for Optical, Semiconductor, and Data Storage Components, (11 November 2002); https://doi.org/10.1117/12.451708

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