Scattering from high-sloped surfaces using the Kirchhoff approximation

Neil Charles Bruce

doi:10.1117/12.451845

22 October 2002 Scattering from high-sloped surfaces using the Kirchhoff approximation

Neil Charles Bruce

Proceedings Volume 4780, Surface Scattering and Diffraction for Advanced Metrology II; (2002) https://doi.org/10.1117/12.451845
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

The Kirchhoff approximation has been used for many years to calculate for the problem of scattering of light from rough surfaces. One of the limitations of the method is on the surface slopes for which the method can be used. For large surface slopes there is more shadowing and multiple scattering and the sampling of the surface, which is in constant intervals of the variable along the mean plane of the surface, becomes a problem. In this work, the Kirchhoff approximation is reformulated to permit the use of this method in surfaces with very high slopes. Results are presented for surfaces containing rectangular shaped grooves, surfaces which have infinite slope on the sidewalls of the grooves.

Citation Download Citation

Neil Charles Bruce "Scattering from high-sloped surfaces using the Kirchhoff approximation", Proc. SPIE 4780, Surface Scattering and Diffraction for Advanced Metrology II, (22 October 2002); https://doi.org/10.1117/12.451845

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