Fabrication of x-ray spiral masks by laser ablation

Andrew G. Peele; Keith A. Nugent; Phillip J. McMahon; David Paterson; Chanh Q. Tran; Adrian Mancuso; Tracy R. Mackin; Jason P. Hayes; Erol C. Harvey; Ian McNulty

doi:10.1117/12.451024

21 November 2002 Fabrication of x-ray spiral masks by laser ablation

Andrew G. Peele, Keith A. Nugent, Phillip J. McMahon, David Paterson, Chanh Q. Tran, Adrian Mancuso, Tracy R. Mackin, Jason P. Hayes, Erol C. Harvey, Ian McNulty

Author Affiliations +

Proceedings Volume 4783, Design and Microfabrication of Novel X-Ray Optics; (2002) https://doi.org/10.1117/12.451024
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

The manipulation of x-rays by phase structures is becoming more common through devices such as compound refractive lenses, blazed zone-plates and other structures. A spiral phase modulation structure can be used to condition an x-ray beam to produce an x-ray vortex. An x-ray beam in this form can be used as the first step towards a self-collimating beam. Also it can be used as a controllable pathological feature in studies of x-ray phase retrieval. We describe the microfabrication of a spiral phase modulation structure by excimer laser ablation. A multi-step fabrication using 15 separate chrome-on-quartz mask patterns is used to create a 16 step spiral staircase structure approximating the desired spiral ramp. The results of simulations and initial experimental results are presented.

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Andrew G. Peele, Keith A. Nugent, Phillip J. McMahon, David Paterson, Chanh Q. Tran, Adrian Mancuso, Tracy R. Mackin, Jason P. Hayes, Erol C. Harvey, and Ian McNulty "Fabrication of x-ray spiral masks by laser ablation", Proc. SPIE 4783, Design and Microfabrication of Novel X-Ray Optics, (21 November 2002); https://doi.org/10.1117/12.451024

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