Fabrication and characterization of Sb-doped Sn02 thin films derived from methacrylic-acid-modified tin(IV)alkoxides

Terho K. Kololuoma; Ari Tolonen; Leena-Sisko Johansson; Joseph M. Campbell; Ari H. O. Karkkainen; Marianne Hiltunen; Tomi Haatainen; Juha T. Rantala

doi:10.1117/12.453546

23 October 2002 Fabrication and characterization of Sb-doped Sn0₂ thin films derived from methacrylic acid modified tin(IV)alkoxides

Terho K. Kololuoma, Ari Tolonen, Leena-Sisko Johansson, Joseph M. Campbell, Ari H. O. Karkkainen, Marianne Hiltunen, Tomi Haatainen, Juha T. Rantala

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Proceedings Volume 4804, Sol-Gel Optics VI; (2002) https://doi.org/10.1117/12.453546
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

We report on the fabrication of transparent, conductive and directly photopatternable, pure and Sb-doped tin dioxide thin films. Precursors used were antimony(III)isopropoxide and a photo-reactive tin alkoxide synthesized from tin(IV)isopropoxide and methacrylic acid. The synthesis of methacrylic acid modified tin alkoxide was monitored in-situ using IR- and ESI-TOF mass spectroscopic techniques. Sb-doped organo-tin films were deposited via single layer spin coating. After deposition the films were patterned via photopolymerization, using a mercury I-line UV-lamp. All investigated materials could be patterned with 3 μm features. After development in isopropanol, the films were annealed in air, in order to obtain crystalline and conductive films. The electrical conductivities of the annealed thin films with, and without, UV-irradiation were determined using a linear four-point method. The direct photopatterning process was found to increase the film conductivity for all the Sb-doping levels tested. The mechanisms for the increased conductivity were characterized using AFM, XPS and XRD techniques.

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Terho K. Kololuoma, Ari Tolonen, Leena-Sisko Johansson, Joseph M. Campbell, Ari H. O. Karkkainen, Marianne Hiltunen, Tomi Haatainen, and Juha T. Rantala "Fabrication and characterization of Sb-doped Sn0₂ thin films derived from methacrylic acid modified tin(IV)alkoxides", Proc. SPIE 4804, Sol-Gel Optics VI, (23 October 2002); https://doi.org/10.1117/12.453546

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KEYWORDS

Tin

Antimony

Thin films

Crystals

Ions

Doping

Sodium

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