3D microfabrication in photosensitive glass by femtosecond laser

Masashi Masuda; Koji Sugioka; Y. Cheng; Naoko Aoki; Masako Kawachi; Kazuhiko Shihoyama; Koichi Toyoda; Katsumi Midorikawa

doi:10.1117/12.486548

19 February 2003 3D microfabrication in photosensitive glass by femtosecond laser

Masashi Masuda, Koji Sugioka, Y. Cheng, Naoko Aoki, Masako Kawachi, Kazuhiko Shihoyama, Koichi Toyoda, Katsumi Midorikawa

Author Affiliations +

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486548
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

We describe a true three dimensional (3D) microfabrication of photosensitive glass by applying a femtosecond (fs) laser which works at fundamental wavelength. First, designed microstructure was written into the glass sample by a tightly focused fs laser beam (wavelength 775nm, pulse width 145±5fs, repetition rate 1kHz); next, this sample underwent a programmed heat treatment; finally it was immersed into 10% hydrofluoric (HF) acid to take an ultrasonic bath. By this approach, true 3D microstructures with embedded microchannels and microcells are directly formed inside the glass matrix, without extra bonding or adhering procedures in those planar fabrication techniques. Such an approach combines the advantages of high precision in laser microfabrication and cost-effectiveness in chemical processing, therefore, could be a promising tool in futuristic manufacture of micro total analysis systems (μ-TAS) and micro fluidic devices.

Citation Download Citation

Masashi Masuda, Koji Sugioka, Y. Cheng, Naoko Aoki, Masako Kawachi, Kazuhiko Shihoyama, Koichi Toyoda, and Katsumi Midorikawa "3D microfabrication in photosensitive glass by femtosecond laser", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486548

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