Enhancement of multilayer-coated normal incidence gratings in the extreme ultraviolet using a CN_x smoothing layer

Robert A. Stern; Lawrence Shing; Yip-Wah Chung; Murat U. Guruz

doi:10.1117/12.459817

24 February 2003 Enhancement of multilayer-coated normal incidence gratings in the extreme ultraviolet using a CN_x smoothing layer

Robert A. Stern, Lawrence Shing, Yip-Wah Chung, Murat U. Guruz

Author Affiliations +

Proceedings Volume 4854, Future EUV/UV and Visible Space Astrophysics Missions and Instrumentation; (2003) https://doi.org/10.1117/12.459817
Event: Astronomical Telescopes and Instrumentation, 2002, Waikoloa, Hawai'i, United States

Abstract

We describe a novel process to improve the extreme ultraviolet (EUV) reflection efficiency of multilayer-coated replica gratings through an intermediate CN_X overcoat. Au-coated and uncoated (SiO₂ surface) Hitachi replica gratings (20 x 20 mm, 4800 g/mm, 13° blaze angle), designed to provide peak efficiencies at 304 Å in 3rd order, were measured using an AFM prior to and after the CN$_X coating. The CN_X coating produced substantially smoother grating facets without significantly degrading the grating groove profile. The gratings were then overcoated with a 10 layer Mo/Si stack optimized for near normal reflectivity at 304 Å. Reflectivity measurements in 3rd order demonstrated an enhancement in absolute grating efficiency by a factor of 4 over the Mo/Si + Au-coated grating. The results of this simple experiment suggest that, with further improvements, the CN_X overcoating process may provide a useful and relatively inexpensive alternative to the use of ion-etched blazed gratings in the EUV for some applications.

Citation Download Citation

Robert A. Stern, Lawrence Shing, Yip-Wah Chung, and Murat U. Guruz "Enhancement of multilayer-coated normal incidence gratings in the extreme ultraviolet using a CN_x smoothing layer", Proc. SPIE 4854, Future EUV/UV and Visible Space Astrophysics Missions and Instrumentation, (24 February 2003); https://doi.org/10.1117/12.459817

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