Noncontact measurements of local distances in partially coherent light

Ye. V. Sysoev; I. V. Golubev; Rodion V. Kulikov

doi:10.1117/12.484608

29 July 2002 Noncontact measurements of local distances in partially coherent light

Ye. V. Sysoev, I. V. Golubev, Rodion V. Kulikov

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484608
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

The measurement of local distances by use of the interference pattern of partially coherent light is described. A new technique has been proposed for a single-touch measurement of the distance to a object point (a minimum size is not more than 10 ?m) of the object surface with an error of not more than 2 ?m, by reading interference patterns on a single-element photoreceiver. Experimental verification has been carried out, the results are provided.

Citation Download Citation

Ye. V. Sysoev, I. V. Golubev, and Rodion V. Kulikov "Noncontact measurements of local distances in partially coherent light", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484608

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