X-ray scanner: a new device for rapid visualization of surface roughness

V. A. Labusov; O. A. Nekludov; Peter E. Tverdokhleb; Vladimir V. Protopopov; Kamil A. Valiev

doi:10.1117/12.484458

29 July 2002 X-ray scanner: a new device for rapid visualization of surface roughness

V. A. Labusov, O. A. Nekludov, Peter E. Tverdokhleb, Vladimir V. Protopopov, Kamil A. Valiev

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484458
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

In the x-ray region the reflectivity of a superpolished surface strongly depends on its roughness. This effect may be used to obtain a two-dimensional map of the roughness spatial distribution for flat surface with an average roughness height of the order of one nanometer or less. The method described in the paper cosists in illumination of the sample by a highly collimated x-ray beam, and a line one-dimensional scanning of the sample with simultaneous registration of the specular component of the reflected beam by multielement linear detector. This method may be used to monitor the surface quality of silicon semiconductor wafers, computer hard disks, x-ray and laser mirror substrates etc.

Citation Download Citation

V. A. Labusov, O. A. Nekludov, Peter E. Tverdokhleb, Vladimir V. Protopopov, and Kamil A. Valiev "X-ray scanner: a new device for rapid visualization of surface roughness", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484458

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