Research of spatial resolution in external electro-optic probing

Hongbo Zhang; Rui Wang; Kaixin Chen; Han Yang; Daming Zhang; Maobin Yi

doi:10.1117/12.482218

5 September 2002 Research of spatial resolution in external electro-optic probing

Hongbo Zhang, Rui Wang, Kaixin Chen, Han Yang, Daming Zhang, Maobin Yi

Proceedings Volume 4913, Semiconductor Lasers and Applications; (2002) https://doi.org/10.1117/12.482218
Event: Photonics Asia, 2002, Shanghai, China

Abstract

A new rnethod, based on zero point of longitudinal electric field, was used to deterrnine the spatial resolution of electro-optic (EO) probing systern. To examine the spatial resolution of internal and external EO probing systems, an interdigital structure is fabricated on GaAs substrate with and without a layer of Si02 between the electrode and the substrate respectively. Considering Si02 layer or air gap between electrode and EO crystal, the result of electro-optic probing was simulated which is well accorded with experiment. The result indicates that spatial resolution of less than 0.5um and lum are obtained in internal and external EO probing system respectively.

Citation Download Citation

Hongbo Zhang, Rui Wang, Kaixin Chen, Han Yang, Daming Zhang, and Maobin Yi "Research of spatial resolution in external electro-optic probing", Proc. SPIE 4913, Semiconductor Lasers and Applications, (5 September 2002); https://doi.org/10.1117/12.482218

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