Holographic fabrication of micron structures using interfered femtosecond laser beams split by diffractive optics

Yoshiki Nakata; Tatsuo Okada; Mitsuo Maeda

doi:10.1117/12.479546

17 October 2003 Holographic fabrication of micron structures using interfered femtoseond laser beams split by diffractive optics

Yoshiki Nakata, Tatsuo Okada, Mitsuo Maeda

Author Affiliations +

Proceedings Volume 4977, Photon Processing in Microelectronics and Photonics II; (2003) https://doi.org/10.1117/12.479546
Event: High-Power Lasers and Applications, 2003, San Jose, CA, United States

Abstract

A line of periodic dot structure was fabricated on and inside materials by laser-induced modification with interfered femtosecond laser beams split by a diffractive optics. In addition, dot matrix and comb structures were fabricated with transportation of a sample at arbitrary speeds. These structures worked as transmission and reflection gratings. In addition, nanowires were fabricated by peeling the comb structure. Dot matrix was also formed by a single shot of laser ablation with four interfering beams.

Citation Download Citation

Yoshiki Nakata, Tatsuo Okada, and Mitsuo Maeda "Holographic fabrication of micron structures using interfered femtoseond laser beams split by diffractive optics", Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); https://doi.org/10.1117/12.479546

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