Erbium/ytterbium-activated silica-titania planar and channel waveguides prepared by rf-sputtering

Alessandro Chiasera; Maurizio Montagna; Cristiana Tosello; Rogeria Rocha Goncalves; Andrea Chiappini; Maurizio Ferrari; Luca Zampedri; Stefano Pelli; Giancarlo C. Righini; Andre Monteil; Vittorio Foglietti; Antonio Minotti; Rui Manuel Almeida; A. Marques; V. Soares

doi:10.1117/12.474774

17 June 2003 Erbium/Ytterbium-activated silica-titania planar and channel waveguides prepared by rf-sputtering

Alessandro Chiasera, Maurizio Montagna, Cristiana Tosello, Rogeria Rocha Goncalves, Andrea Chiappini, Maurizio Ferrari, Luca Zampedri, Stefano Pelli, Giancarlo C. Righini, Andre Monteil, Vittorio Foglietti, Antonio Minotti, Rui Manuel Almeida, A. Marques, V. Soares

Author Affiliations +

Proceedings Volume 4990, Rare-Earth-Doped Materials and Devices VII; (2003) https://doi.org/10.1117/12.474774
Event: Integrated Optoelectronics Devices, 2003, San Jose, CA, United States

Abstract

SiO₂-TiO₂:Er³⁺-Yb³⁺ waveguides were prepared by rf-sputtering technique. The active films were deposited on silica-on-silicon and v-SiO₂ substrates. The parameters of preparation were chosen in order to optimize the waveguides for operation in the NIR region with particular attention to the minimization of losses. The thickness of the waveguides and the refractive index at 632.8 and 543.5 nm were measured by an m-line apparatus. The losses, for the TE0 mode, were evaluated at 632.8 and 1300 nm. Roughness measurements were carried out by means of a stylus profilometer. The structural properties were investigated with several techniques such as Energy Dispersive Spectroscopy and Raman Spectroscopy. All waveguides were single-mode at 1550 nm. An attenuation coefficient equal or lower than 0.2 dB/cm was measured both at 632.8 nm and 1300 nm. The emission ⁴I_13/2→⁴I_15/2of Er³⁺ion transition with a 40 nm bandwidth was observed upon excitation in the TE0 mode at 981 and 514.5 nm. Back energy transfer from Er³⁺to Yb³⁺was demonstrated by measurement of Yb³⁺emission upon Er³⁺excitation at 514.5 nm. Photoluminescence excitation spectroscopy was used to obtain information about the effective excitation efficiency of Er³⁺ions by co-doping with Yb³⁺ions. Channel waveguides in rib configuration were obtained by etching the active film by a wet etching process. Scanning Electron Microscopy was used to analyze the morphology of the waveguides.

Citation Download Citation

Alessandro Chiasera, Maurizio Montagna, Cristiana Tosello, Rogeria Rocha Goncalves, Andrea Chiappini, Maurizio Ferrari, Luca Zampedri, Stefano Pelli, Giancarlo C. Righini, Andre Monteil, Vittorio Foglietti, Antonio Minotti, Rui Manuel Almeida, A. Marques, and V. Soares "Erbium/Ytterbium-activated silica-titania planar and channel waveguides prepared by rf-sputtering", Proc. SPIE 4990, Rare-Earth-Doped Materials and Devices VII, (17 June 2003); https://doi.org/10.1117/12.474774

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available