Fine structure measurement in the SEM cross section of LSI using the Canny edge detector

Yoshihiro Midoh; Katsuyoshi Miura; Koji Nakamae; Hiromu Fujioka

doi:10.1117/12.474039

22 May 2003 Fine structure measurement in the SEM cross section of LSI using the Canny edge detector

Yoshihiro Midoh, Katsuyoshi Miura, Koji Nakamae, Hiromu Fujioka

Proceedings Volume 5011, Machine Vision Applications in Industrial Inspection XI; (2003) https://doi.org/10.1117/12.474039
Event: Electronic Imaging 2003, 2003, Santa Clara, CA, United States

Abstract

In this paper, we describe a method to optimize parameters of the Canny edge detector, when it is applied to critical dimension (CD) measurements in the cross-sectional scanning electron microscope (SEM) image of the LSI. The Canny is a typical boundary extraction method that convolves the input image with the Laplacian of the Gaussian mask to suppress noise and identify the zero crossing points. The parameters to be optimized are a standard deviation of the Gaussian mask and a threshold value that is used when the zero crossing points are identified. The statistical characteristics of the noise in the SEM image are well known: the major gredient of the SEM image is shot noise. Therefore shot noise is assumed in this method. We apply the method to a model image where shot noise is added and derive the condition where the Canny is effective to measure the fine structure in the image accurately.

Citation Download Citation

Yoshihiro Midoh, Katsuyoshi Miura, Koji Nakamae, and Hiromu Fujioka "Fine structure measurement in the SEM cross section of LSI using the Canny edge detector", Proc. SPIE 5011, Machine Vision Applications in Industrial Inspection XI, (22 May 2003); https://doi.org/10.1117/12.474039

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KEYWORDS

Scanning electron microscopy

Gaussian filters

Sensors

Edge detection

Critical dimension metrology

Detection and tracking algorithms

Signal to noise ratio

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