Will Darwin's law help us to improve our resist models?

Bernd Tollkuhn; Tim Fuehner; Daniela Matiut; Andreas Erdmann; Armin Semmler; Bernd Kuechler; Gabriella Kokai

doi:10.1117/12.485078

12 June 2003 Will Darwin's law help us to improve our resist models?

Bernd Tollkuhn, Tim Fuehner, Daniela Matiut, Andreas Erdmann, Armin Semmler, Bernd Kuechler, Gabriella Kokai

Proceedings Volume 5039, Advances in Resist Technology and Processing XX; (2003) https://doi.org/10.1117/12.485078
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

Calibration of resist model parameters becomes more and more important in lithography simulation. The general goal of such a calibration procedure is to find parameters and model options which minimize the difference between experimentally measured and simulated data. In this paper a multidimensional downhill simplex method and a genetic algorithm are introduced. We investigate the performance of different modeling options such as the diffusivity of the photogenerated acid and of the quencher base, and different development models. Furthermore, new objective functions are proposed and evaluated: The overlap of process windows between simulated and experimental data and the comparison of linearity curves. The calibration procedures are performed for a 248nm and for a 193nm chemically amplified resist, respectively.

Citation Download Citation

Bernd Tollkuhn, Tim Fuehner, Daniela Matiut, Andreas Erdmann, Armin Semmler, Bernd Kuechler, and Gabriella Kokai "Will Darwin's law help us to improve our resist models?", Proc. SPIE 5039, Advances in Resist Technology and Processing XX, (12 June 2003); https://doi.org/10.1117/12.485078

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