High-speed measurements using optical profiler

Joanna Schmit

doi:10.1117/12.501035

30 May 2003 High-speed measurements using optical profiler

Joanna Schmit

Proceedings Volume 5144, Optical Measurement Systems for Industrial Inspection III; (2003) https://doi.org/10.1117/12.501035
Event: Optical Metrology, 2003, Munich, Germany

Abstract

We present an analysis of the quality of white light interferometric measurements using an optical profiler with increased scan speeds up to 100 microns per second. A centroid approach was chosen for the white light fringe analysis because it is among the quickest to compute. The increase in speed requires a decrease in the spectral bandwidth of the illumination source. Only certain sampling rates (scanner speeds) yield suitable results for finding the position of the white light fringe envelope. Sampling rate, spectral bandwidth, noise, vibration and camera integration time all influence the quality of the measurements. Although precisely calibrating the scanner is one approach for achieving accurate measurements, our preferred method is determining the scanner speed during the measurement and then utilizing this information in the algorithm. Besides assuring highly accurate measurements this method avoids the delicacy and fine tuning that accompanies the calibration of the scanner. Our optical profiler system allows variable scan rates from 4.8 microns per second all the way up to 100 microns per second, which yields very precise measurements when a slower scan rate is used, extremely fast measurements with still high repeatability or any combination of speed and accuracy depending on the scan rate. We find that this combination of precision and speed make this system quite well suited for industrial measurement of a wide range of sample heights from hundreds of nanometers up to eight millimeters.

Citation Download Citation

Joanna Schmit "High-speed measurements using optical profiler", Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); https://doi.org/10.1117/12.501035

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available