Structural parameter of color separating grating and its physical characteristics

Fuhua Gao; Jianhua Zhu; Feng Gao; Jianli Liu; Yongkang Guo; Ziqiang Hu

doi:10.1117/12.505019

3 November 2003 Structural parameter of color separating grating and its physical characteristics

Fuhua Gao, Jianhua Zhu, Feng Gao, Jianli Liu, Yongkang Guo, Ziqiang Hu

Proceedings Volume 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II; (2003) https://doi.org/10.1117/12.505019
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

The CSG’s physical performance is decided by its structural parameters, such as width of grating stair, height of grating stair, and the shape of stair edge. Consideration of the practical fabrication process, an error model of CSG’s structure is built to express the relationship between CSG’s performance and its structural parameters. In this model, each structural parameter of CSG is expressed as a variable, and the structural parameter error induced by fabrication process is expressed as minute disturb of relative variable. Through analysis and simulation, we obtained a general estimation standard for the structural parameter errors of CSG, which provides a theoretical direction for CSG’s fabrication and usage.

Citation Download Citation

Fuhua Gao, Jianhua Zhu, Feng Gao, Jianli Liu, Yongkang Guo, and Ziqiang Hu "Structural parameter of color separating grating and its physical characteristics", Proc. SPIE 5183, Lithographic and Micromachining Techniques for Optical Component Fabrication II, (3 November 2003); https://doi.org/10.1117/12.505019

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