Focusing properties of x-ray polymer refractive lenses from SU-8 resist layer

Anatoly A. Snigirev; Irina Snigireva; Michael Drakopoulos; Vladimir Nazmov; Elena Reznikova; Sergey Kuznetsov; Maxim Grigoriev; Jurgen Mohr; Volker Saile

doi:10.1117/12.507111

23 December 2003 Focusing properties of x-ray polymer refractive lenses from SU-8 resist layer

Anatoly A. Snigirev, Irina Snigireva, Michael Drakopoulos, Vladimir Nazmov, Elena Reznikova, Sergey Kuznetsov, Maxim Grigoriev, Jurgen Mohr, Volker Saile

Author Affiliations +

Proceedings Volume 5195, Crystals, Multilayers, and Other Synchrotron Optics; (2003) https://doi.org/10.1117/12.507111
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Compound refractive lenses printed in Al and Be are becoming the key X-ray focusing and imaging components of beamline optical layouts at the 3^rd generation synchrotron radiation sources. Recently proposed planar optical elements based on Si, diamond etc. may substantially broaden the spectrum of the refractive optics applicability. Planar optics has focal distances ranging from millimeters to tens of meters offering nano- and micro-focusing lenses, as well as beam condensers and collimators. Here we promote deep X-ray lithography and LIGA-type techniques to create high aspect-ratio lens structures for different optical geometries. Planar X-ray refractive lenses were manufactured in 1 mm thick SU-8 negative resist layer by means of deep synchrotron radiation lithography. The focusing properties of lenses were studied at ID18F and BM5 beamlines at the ESRF using monochromatic radiation in the energy range of 10 - 25 keV. By optimizing lens layout, mask making and resist processing, lenses of good quality were fabricated. The resolution of about 270 nm (FWHM) with gain in the order of 300 was measured at 14 keV. In-line holography of B-fiber was realized in imaging and projection mode with a magnification of 3 and 20, respectively. Submicron features of the fiber were clearly resolved. A radiation stability test proved that the fabricated lenses don't change focusing characteristics after dose of absorbed X-ray radiation of about 2 MJ/cm³. The unique radiation stability along with the high effficiency of SU8 lenses opens wide range of their synchrotron radiation applications such as microfocusing elements, condensers and collimators.

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Anatoly A. Snigirev, Irina Snigireva, Michael Drakopoulos, Vladimir Nazmov, Elena Reznikova, Sergey Kuznetsov, Maxim Grigoriev, Jurgen Mohr, and Volker Saile "Focusing properties of x-ray polymer refractive lenses from SU-8 resist layer", Proc. SPIE 5195, Crystals, Multilayers, and Other Synchrotron Optics, (23 December 2003); https://doi.org/10.1117/12.507111

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