Use of online spectrophotometric data for the characterisation of VUV coatings

Jordi Sancho-Parramon; Salvador Bosch; Josep Ferre-Borrull; Stefan Guenster; Detlev Ristau

doi:10.1117/12.514418

25 February 2004 Use of online spectrophotometric data for the characterisation of VUV coatings

Jordi Sancho-Parramon, Salvador Bosch, Josep Ferre-Borrull, Stefan Guenster, Detlev Ristau

Proceedings Volume 5250, Advances in Optical Thin Films; (2004) https://doi.org/10.1117/12.514418
Event: Optical Systems Design, 2003, St. Etienne, France

Abstract

The optical behavior of multilayer coatings for the VUV region is determined by dispersion and absorption of the used materials, non-ideal interfaces between layers and thickness of each component layer. Therefore, an accurate characterization of a multilayer stack encounters the inherent difficulties related to dealing with a high number of defining parameters. The use of on-line data (data acquired during the deposition process) allows a more precise characterization of the coatings, in comparison with the use of standard spectrophotometric measurements obtained after the deposition of the layers. Here we present the results of the characterization of a high reflecting coating where the component materials are fluorides (LaF₃ and MgF₂). Several models with an increasing degree of complexity and assuming different multilayer growing concepts have been applied for the description of the analyzed sample.

Citation Download Citation

Jordi Sancho-Parramon, Salvador Bosch, Josep Ferre-Borrull, Stefan Guenster, and Detlev Ristau "Use of online spectrophotometric data for the characterisation of VUV coatings", Proc. SPIE 5250, Advances in Optical Thin Films, (25 February 2004); https://doi.org/10.1117/12.514418

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