Paper
23 December 2003 Optimizing microfluidic ink delivery for dip pen nanolithography
Debjyoti Banerjee, Nabil A. Amro, Joe Fragala
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Abstract
This work demonstrates the design optimization, fabrication process development, process optimization and testing of a microfluidic ink delivery apparatus (called "Inkwells") for simultaneously coating an array of DPN pens with different inks. The objective of this work is to deliver between 4 and 10 different inks from reservoirs into appropriately spacd microwell array. A tips of the multi-pen array are coated with different inks by dipping them into the microwell array. The reservoirs, microwells and their connecting micro-channels were etched in silicon wafers using Deep Reactive Ion Etching (DRIE). Fluid actuation was achieved by capillary wicking. The optimum layouts for different applications were selected with respect to the volume requirement of inks, the efficacy of ink-well filling, to obviate the problem of bubble formation, and to test the operations of dipping and writing with a parallel array of pens.
© (2003) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Debjyoti Banerjee, Nabil A. Amro, and Joe Fragala "Optimizing microfluidic ink delivery for dip pen nanolithography", Proc. SPIE 5345, Microfluidics, BioMEMS, and Medical Microsystems II, (23 December 2003); https://doi.org/10.1117/12.524474
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Microfluidics

Scanning probe lithography

Silicon

Deep reactive ion etching

Semiconducting wafers

Capillaries

Nanolithography

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