Fabrication of passively aligned micro-optics using focused ion beam

Waleed S. Mohammed; Eric G. Johnson

doi:10.1117/12.522067

29 December 2003 Fabrication of passively aligned micro-optics using focused ion beam

Waleed S. Mohammed, Eric G. Johnson

Proceedings Volume 5347, Micromachining Technology for Micro-Optics and Nano-Optics II; (2003) https://doi.org/10.1117/12.522067
Event: Micromachining and Microfabrication, 2004, San Jose, California, United States

Abstract

Integration of micro-optical elements presents numerous challenges to the optical engineer in both fabrication and integration schemes. Therefore, prototyping integrated micro-optics is somewhat prohibitive due to cost and complexity. In this paper, we present a novel technique based on a subtractive milling process for Focused Ion Beam (FIB) milling of micro-optics into semiconductor devices. Results are presented for an integrated micro-lens in a silicon v-groove turning mirror for a passively aligned optical element.

Citation Download Citation

Waleed S. Mohammed and Eric G. Johnson "Fabrication of passively aligned micro-optics using focused ion beam", Proc. SPIE 5347, Micromachining Technology for Micro-Optics and Nano-Optics II, (29 December 2003); https://doi.org/10.1117/12.522067

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