EPL data conversion system

Masahiro Shoji; Nobuyasu Horiuchi

doi:10.1117/12.535002

20 May 2004 EPL data conversion system

Masahiro Shoji, Nobuyasu Horiuchi

Proceedings Volume 5374, Emerging Lithographic Technologies VIII; (2004) https://doi.org/10.1117/12.535002
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

PATACON-EPL is a software product for converting semiconductor mask CAD data to the EB data of masks for EB steppers. This software has several functions, such as pattern placement corresponding to the structure of masks for EB steppers, complementary division for stencil masks, stitching for deforming the shape of a portion for connecting divided portions, proximity effect correction, machine control data generation, mask inspection data generation, and alignment mark insertion. This software operates in the environment in which several to some hundreds of Linux PC's are connected by a high-speed network.

Citation Download Citation

Masahiro Shoji and Nobuyasu Horiuchi "EPL data conversion system", Proc. SPIE 5374, Emerging Lithographic Technologies VIII, (20 May 2004); https://doi.org/10.1117/12.535002

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