Model development and control design for high-speed atomic force microscopy

Andrew G. Hatch; Ralph C. Smith; Tathagata De

doi:10.1117/12.539921

26 July 2004 Model development and control design for high-speed atomic force microscopy

Andrew G. Hatch, Ralph C. Smith, Tathagata De

Proceedings Volume 5383, Smart Structures and Materials 2004: Modeling, Signal Processing, and Control; (2004) https://doi.org/10.1117/12.539921
Event: Smart Structures and Materials, 2004, San Diego, CA, United States

Abstract

This paper addresses the development of energy-based models and model-based control designs necessary to achieve present and projected applications involving atomic force microscopy. The models are based on a combination of energy analysis at the mesoscopic level with stochastic homogenization techniques to construct low-order macroscopic models. Approximate model inverses are then employed as filters to linearize transducer responses for linear robust control design.

Citation Download Citation

Andrew G. Hatch, Ralph C. Smith, and Tathagata De "Model development and control design for high-speed atomic force microscopy", Proc. SPIE 5383, Smart Structures and Materials 2004: Modeling, Signal Processing, and Control, (26 July 2004); https://doi.org/10.1117/12.539921

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