Short coherence transmitted light interferometer for the thickness measurement of Si membranes

Ulrich Breitmeier; Klaus Leonhardt

doi:10.1117/12.544492

10 September 2004 Short coherence transmitted light interferometer for the thickness measurement of Si membranes

Ulrich Breitmeier, Klaus Leonhardt

Proceedings Volume 5457, Optical Metrology in Production Engineering; (2004) https://doi.org/10.1117/12.544492
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

As is shown the thickness of thin membranes and MEMS can be measured using a transmission short coherence interference technique and choosing a suitable wavelength range in the infrared. The method evaluates the phase difference between the object and reference beam and the actual instrument can accommodate a wide thickness measurement range.

Citation Download Citation

Ulrich Breitmeier and Klaus Leonhardt "Short coherence transmitted light interferometer for the thickness measurement of Si membranes", Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); https://doi.org/10.1117/12.544492

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