Recent advances in the development of coherent and incoherent UV and EUV discharge sources

Vladimir M. Borisov; Andrei I. Demin; A. Eltzov; Alexander S. Ivanov; Oleg B. Khristoforov; Yuriy B. Kirykhin; Aleksandr Yu. Vinokhodov; V. A. Vodchits; Valentin A. Mischenko; Alexander V. Prokofiev

doi:10.1117/12.558204

16 June 2004 Recent advances in the development of coherent and incoherent UV and EUV discharge sources

Vladimir M. Borisov, Andrei I. Demin, A. Eltzov, Alexander S. Ivanov, Oleg B. Khristoforov, Yuriy B. Kirykhin, Aleksandr Yu. Vinokhodov, V. A. Vodchits, Valentin A. Mischenko, Alexander V. Prokofiev

Author Affiliations +

Proceedings Volume 5479, Laser Optics 2003: High-Power Gas Lasers; (2004) https://doi.org/10.1117/12.558204
Event: Laser Optics 2003, 2003, St. Petersburg, Russian Federation

Abstract

We report on the experimental status of the development of compact high power (up to 500 W) high repetition rate (up to 6 kHz) excimer lasers and discharge produced plasma sources radiating in an extreme ultraviolet (EUV) region. EUV power more than 70 W (around 13.5 nm wavelength, a bandwidth of 2%) into 2π sr at 1250 Hz was obtained for continuous operation of a source.

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Vladimir M. Borisov, Andrei I. Demin, A. Eltzov, Alexander S. Ivanov, Oleg B. Khristoforov, Yuriy B. Kirykhin, Aleksandr Yu. Vinokhodov, V. A. Vodchits, Valentin A. Mischenko, and Alexander V. Prokofiev "Recent advances in the development of coherent and incoherent UV and EUV discharge sources", Proc. SPIE 5479, Laser Optics 2003: High-Power Gas Lasers, (16 June 2004); https://doi.org/10.1117/12.558204

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